Abstract:
ZrO
2 film has excellent characteristics such as high hardness and high wear resistance, and has broad application prospects in many fields.The preparation of high-quality ZrO
2 thin films has always been important.In this work the magnetic filter cathode vacuum arc (FCVA) technology was used to prepare high-quality ZrO
2 thin films on a single crystal silicon (100) substrate with metal Zr as the cathode.X-ray diffraction (XRD), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) and nanomechanical probes were applied to study the structure, morphology, composition and properties of the prepared film.The influence of O
2 flow rate on crystal structure, morphology, composition and mechanical properties of the ZrO
2 film was studied.ZrO
2 film with good crystal quality, smooth surface and high hardness was obtained.